A novel MEMS LTCC switch matrix

A novel planar 4/spl times/4 switch matrix using microelectromechanical system (MEMS) switches and low temperature cofired ceramic (LTCC) substrate is presented for the first time. Together a 9-layer LTCC substrate and 32 MEMS switches are integrated to create a non-blocking 4/spl times/4 switch matrix functionality with excellent RF performance up to 7 GHz. An accurate model for predicting the interconnect circuit and switch matrix RF performance up to 20 GHz is also presented.