Micromachined millimeter-wave module for power combining

A fully micromachined millimeter-wave module for power combining is proposed and demonstrated. The proposed module consists of a monolithic-microwave integrated circuit (MMIC) RF sources, a finite ground coplanar (FGC) line-to-micromachined waveguide transition, and a section of micromachined waveguide, and thus can be fabricated cost-effectively using modern micromachining techniques. The module is tested with two types of GaAs monolithic frequency doublers as the RF source and shows excellent performance with an RF power efficiency of up to 25% at the output frequency of 72.2 GHz.