A 375 x 365 3D 1k frame/s range-finding image sensor with 394.5 kHz access rate and 0.2 subpixel accuracy

Row-parallel search architecture and focal plane processing using light sections acquires range images at 1052frames/s with accuracy of 1.1mm at 600mm distance. The 24-transistor, 11.25/spl mu/m pitch pixel with 28% fill factor is built in a 0.18/spl mu/m 1P5M CMOS process.