All solid-state 193 nm source with 5 mJ pulse energy

Using CBO crystal as the final mixing nonlinear optical crystal, we generated over 5 mJ/pulse at 193 nm. The high pulse energy at 193 nm is a result of several factors. The efficiency of CBO is about three times better than that of LBO, and an order of magnitude better than BBO. Novel designs in 4/sup th/ and 5/sup th/ harmonic generators using readily available BBO crystals allow the efficient and repetitive generation of high pulse energy at the 5/sup th/ harmonic of 1064 nm.