Fabrication of multi-functional integrated liquid sensors using MEMS and film-bonding technology

In this paper, we present the results of a basic study on fabrication technology of integrated sensors circuit, in which the various sensors based on the mass loading effect, a conductive change, and photo-luminescence methods are integrated on piezoelectric substrate. We propose a design of micro-pump with a simple structure for low cost. Also, the experimental result shows that its controllability of liquid flux is very high sensitive. Moreover, we adopt Au-IDT electrodes with immobilized oxidases for sensing glucose concentration.