Miniaturized SAW motor with 100 MHz driving frequency

Utilization of high frequency 100 MHz miniaturized a surface acoustic wave (SAW) motor down to 3/spl times/12.5/spl times/0.5 mm/sup 3/. To utilize nanometer level amplitude of SAW for friction drive, a 2/spl times/2/spl times/0.5 mm/sup 3/ slider that had 25 /spl mu/m diameter microlens shaped projections on contact surface was introduced. Although the millimeter size small actuator, the miniaturized SAW motor exhibited up to 0.3 m/s high speed and 13 mN high output force over 4.3 mm long stroke. We have recorded highest driving frequency of the SAW motor and also of ultrasonic motors.