Development of a new type of 6-DOF parallel micro-manipulator and its control system

Presently, there are only a few types of mechanisms used in parallel micro-manipulators. In this paper, a new type of 6-DOF parallel micro-manipulator, which adopts a 6-PSS parallel mechanism with decoupling structure, is proposed. The main mechanical structure including base, end-effector, all linkages and flexible joints of the manipulator is a unitary part of design and manufacture. On the other hand, we developed a six-dimension controller based on six-dimension force or moment sensor of Stewart structure, which controls the robots by feeling each other between man and the machine. Then we discuss the precision analyzing and kinematics calibration. At last, a sample machine of the 6-DOF micro-manipulator is given, and some remarkable problems during the system development are proposed.