Luminescence of Pr and Tm ions implanted into AlN thin films

In this presentation, we report on the cathodoluminescence and photoluminescence (PL) properties of Pr and Tm ions implanted into AlN films grown by plasma source molecular beam epitaxy. To optically activate incorporated impurities and remove ion implantation-induced damages, the RE-implanted AlN samples were given isochronal thermal annealing treatments at a temperature of 1050 /spl deg/C in NH/sub 3/.