Multilayer thin-film substrate for multichip packaging

Multilayer thin-film module technologies for high-performance multiple-chip module (MCM) packaging were developed and integrated. The technologies, which feature four copper layers, polyimide dielectric, controlled impedance-transmission lines, and solder-bump assembly, were demonstrated on a variety of vehicles including a 4K RAM module operating above 10-MHz clock frequency. The generic MCM substrate technology is described. The process can be designed to be compatible with a number of substrate materials.<>