MEMS-based modular phased array for low earth orbiting satellite terminals

This paper describes a concept for a single-beam phased array for a low earth orbiting (LEO) satellite terminal. The phased array is made of a number of sub-array modules that constitute the building blocks in the array. The individual module is a highly integrated multilayer structure that contains the radiating elements, the phase shifters, polarizer circuit, and power divider/combiner circuits. The module uses micro-electro-mechanical system (MEMS) technology. The layers in the sub-array module are built with emphasis on integration techniques and choice of material. One option is to use a low temperature co-fired ceramic (LTCC) material that has been proven to have several desirable features as a substrate in microwave applications. These features include low-cost, low-loss, mechanical stability and ease of stacking or vertical integration of printed circuit layers. The sub-array modules are fed by a power dividing network for the transmit array or a power combining network for the receive array.