Fabrication and performance of high-density, matrix-addressable green and ultraviolet micro-LED arrays

The main task involved in the development of micro-LED arrays relates to the electrical contacting and interconnection of each individual pixel. Planarization has been a common solution employed to level out uneven topologies. The fabrication and performance of GaN-based micro-light emitting diode (/spl mu/m-LED) arrays with 64/spl times/64 elements, with emission at the wavelengths of 510nm (green) and 370nm (near-UV), are reported. It is clear that each individual pixel is well resolved and there is no significant optical cross-talk. We will report fully on these devices, and also on 128/spl times/96 arrays at both wavelengths which are currently in development.