Bipolar pulse width modulation driver for MEMS electrostatic actuator arrays

Three-level pulse width modulation serves as the basis of an all-digital technique for driving an array of high-voltage electrostatic microactuators. DC bias is zero and maximum RMS voltage is equal to the single supply voltage. Driver arrays are implemented using a two-chip architecture: a logic chip and an HV level translator array. A micromirror driver array is described, with 1920 drivers that occupy an area of 1280 mm/sup 2/ and consumes 12.3 W from 5-V and 200-V supplies.