Thin film micro carbon oxide sensor using MEMS process

Pt/Na/sup +/ ion conductive ceramics thin film/Pt/carbonate a/sub 2/CO/sub 3/:BaCO/sub 3/=1:1.7 mol) structure micro CO/sub 2/ sensors were prepared and their sensing properties were investigated. The thin film Na/sup +/ ion conductors formed by using RF magnetron sputtering technique. The chemical composition of thin film Nae6>/e6> ion conductor was found to be same as that of NASICON(x=2). The nernst slope of 57 mV/decade or CO/sub 2/ concentration range between 1,000 to 10,000 ppm was observed at the operating temperature of 400/spl deg/C.