Photo-thermoelectric power generation for autonomous microsystems

This work deals with the feasibility study, the modeling and the design of an integrated photo-thermoelectric micro generator for autonomous microsystems. In particular each single part of such an autonomous system, composed by moving elements, and energy supply system has been just developed by the authors, taking into account a standard CMOS technology and suitable micro-machining compatible processes. Micro lenses have been used to achieve high efficiency for the thermoelectric conversion. The discussed work expands our photo-thermomechanical actuation strategy and allows to further enhance the device efficiency.