Improved 0.25 /spl mu/m salicide yield via amorphous poly process optimizing

The influence of process was investigated on A-Si poly bump in this research, especially the density of poly bump was also studied to realize its characterization. This study showed that oxygen concentration has strong correlation with the bump density. In other word, the bump density increases as oxygen concentration increase. In order to reduce O/sub 2/ concentration, the following approach is described to verify it: 1) deposition pressure, 2) loading and unloading temperature, 3) loading area O/sub 2/ concentration - lower O2 concentration on loading area would get lowly bumps. In conclusion, the CP yield gained about 13% on Saliside product on well control a-poly process condition.