Ultra-precision air-pin sensor and its dynamic characteristic research

Non-contact pneumatic measurement technique is an important method in the dimension measurements of machine parts. In the recent years, the authors have developed the new type of air-pin pneumatic-electronic sensor. In this paper, Ultra-precision Air-pin Sensor and Its Dynamic Characteristic have been studied. The air-pin pneumatic-electronic sensor with 10 /spl mu/m in the measurement range, and its measurement accuracy is better than 0.1/spl mu/m, and its response time is less 10 ms.