Modelling of ZnO-based BAWs at high signal levels

This paper proposes a method to simulate the center frequency shift in bulk acoustic wave (BAW) filters, caused by high input signal levels, which heat up the devices. The results were verified by wafer level measurements and on diced devices wire bonded to jigs. In addition the temperature distribution on diced samples was imaged with an infrared camera. The measured and calculated center frequency shifts as well as the temperature distribution in filters correlate fairly well.