Micro electret power generator

We present the first micromachined rotational electret power generator, linearized theoretical model of electret power generation, and novel method to produce uniformly charged electret. We also improved our previously developed (1996, 1999) thin film Teflon AF 1601-S electret technology with respect to dielectric thickness, charge uniformity, and processability. In demonstration, our prototype power generator successfully generated > 25/spl mu/W with electret thickness of 9/spl mu/m, effective charge density of -2.8/spl times/10/sup -4/C/m/sup 2/, and rotational speed of 4170RPM.