2 axes optical switch with holding mechanism

An optical switch which has a ratchet system to hold micro-mirrors without electric power has been studied. The micro-mirrors are supported by 2 axes torsion-bars and driven by Lorentz force caused by external magnetic field and coil current. The maximum tilted mirror angle of 23 degrees was obtained. The ratchets are Si beams, which are distorted by shrinkage of cured polyimide, and the micro-mirrors are symmetrically held between the beams. It was confirmed that the ratchets worked well to hold the micro-mirrors. The minor was completely released by bending the beams thermally with electric current.