A study on hermetic packaging for micro-optical switch

With the size, force and other physical parameters reaching micron scale, MOEMS (Mcro-Optical-Electro-Mechanical System) devices will be more vulnerable in moisture and other corrosive circumstance. To keep away from moisture and other harmful gases, hermetic packaging for micro-optical switches has been investigated. The deterioration of partial pressure of the gas inside the package has been theoretically analyzed. The pressure variation related to leakage, gas permeation, gas desorption and adsorption to inner surface within the sealed space of a micro-optical 4" 4" switch was discussed. A hermetic packaging prototype with micro-optical switch has been designed and fabricated. Its leakage rate was determined less than 1 /spl times/ 10/sup -7/ std cc/sec by a Varian 959 Portable Leak Detector operating in helium bombing mode.