Fully Flexible Vibration Sensor Based on Suspended Membrane with Metal Microcracks

Vibration sensors have demonstrated irreplaceable application value in health monitoring and intelligent diagnostics. However, traditional rigid vibration sensors are limited in wearable electronics and human—machine interaction applications due to factors such as mechanical brittleness, high weight, and installation methods. To address these challenges, this paper presents a fully flexible Vibration Sensor Utilizing Intentional based on Suspended Membrane with Metal Microcracks. The sensor employs a beam-membrane cavity structure and highly sensitive crack structures, which effectively enhances the sensitivity to external vibrations. Experimental results show that the resistance of the vibration sensors changes significantly under vibration, showing a substantial increase in vibration sensitivity to 0.037 (compared to the typical average value of around 0.006) and a dynamic range vibration frequency detection of 0-5000 Hz. Performance tests indicate that the sensor can accurately detect vibration acceleration with a measurement error of less than 5 %, making it suitable for applications such as industrial equipment condition monitoring. Additionally, the sensor features lightweight integration, flexible conformal attachability, and a simplified installation method, which avoids impacting the structural integrity of the monitored objects. Its simple fabrication process also reduces production costs and manufacturing complexity, facilitating wide applications in various fields. The proposed fully flexible vibration sensors are expected to play an important role in human-machine interaction.