ChatTCAD: Leveraging Large Language Models for Automated TCAD Simulation File Generation

With continuous transistor scaling in nanoscale technology nodes, predicting device performance and analyzing reliability have become increasingly challenging. Technology Computer-Aided Design (TCAD) tools offer detailed physical modeling with atomistic-level accuracy without costly prototyping or wafer-level measurements. However, creating TCAD device files remains labor-intensive and requires domain expertise. Recent advances in large language models (LLMs) offer promising opportunities to automate stages of electronic design automation (EDA). While LLMs have shown promise in other EDA domains, their application to TCAD simulation remains underexplored. This work presents ChatTCAD, a framework that fine-tunes an LLM to automatically generate TCAD device files from natural language descriptions. Our approach combines a synthetically constructed dataset with carefully designed prompt strategies to support both single-function and complete-device script generation. Experimental results show that ChatTCAD can generate high-quality, executable TCAD device files.