Piezoelectric Micromirror with Integrated Resonant Sensor

This paper reports on a novel piezoelectric micromirror with integrated resonant sensor, which will allow, for the first time, a precise angle measurement for covering very low-frequency operation regime without increasing the fabrication complexity. The fabricated integrated sensor successfully changed its oscillation frequency according to the angle change of piezoelectric micromirror within a phase-locked loop. The stable long-term sensing was performed over 9 sec.