Split Accelerated Degradation Test Platform Without On-Chip Sensor for Long-Term Reliability of 2D MEMS Mirrors

For the first time, this paper reports a split accelerated degradation test platform (S-ADTP) without any on-chip sensor, which can accurately evaluate the degradation characteristics of 2D MEMS mirrors under elevated temperature in real time. S-ADTP shows the higher and more temperature-robust accuracy compared with on-chip sensor. Experimental results show that S-ADTP shows a 18% higher and temperature-robust accuracy than on-chip piezoresistive sensor under varying-temperature conditions, and has no risk of failure. Based on this, long-term degradations of the resonant frequency and torsional angle of MEMS mirrors are revealed experimentally. This paper will provide a temperature-robust method without any on-chip sensor for long-term accelerated degradation characterization of 2D MEMS mirrors.