300 GHz 8 × 1 Active Phased Array MMIC with On-Chip Power Amplifiers, Vector Modulators, and Antennas

This paper reports on an eight-channel active phased array monolithic microwave integrated circuit (MMIC) which includes on-chip vector modulators, power amplifiers, and antennas, all operating around a 300 GHz frequency range. They are manufactured on a 35 nm InGaAs metamorphic high-electron-mobility transistor technology. The on-wafer measurements of the MMIC are included in this work. A greater than 20 dB gain is measured from 260GHz to 320 GHz for each channel of the MMIC. A 6dBm peak output power per channel is measured at 300 GHz. In terms of the phase shifting and compensation, a four-bit resolution is demonstrated from 290 GHz to 320 GHz. Considering the integration complexity of the chip, the achieved bit resolution in tandem with the operating bandwidth and degree of amplification, the demonstrated MMIC represents a first-time realization for III-V semiconductor-based technologies.