Defects in the Finishing Process of Micro-Optical Lenses: Analysis and Mitigation Strategies

Micro-optical lenses are critical components in modern optoelectronics, medical devices, and imaging systems. However, finishing processes such as polishing, grinding, and laser ablation often introduce surface and subsurface defects, degrading optical performance. This paper investigates common defects (e.g., scratches, pits, waviness, and residual stresses), their root causes, and advanced characterization techniques (AFM, white-light interferometry, SEM). Furthermore, we discuss mitigation strategies, including process optimization and alternative finishing methods (ion-beam polishing, plasma etching). The study aims to provide a framework for improving manufacturing precision and optical quality in micro-lens.