Design of Readout Circuit and System for Miniaturizated Gas Sensor Applications

This article provides the development of readout circuits and systems for miniaturization gas sensors, specifically designed for applications using semiconductor thin-film resistive gas sensing materials. Due to the high sensitivity, fast response, and high selectivity of semiconductor thin-film materials, they are widely used in specialized scenarios such as indoor air quality, outdoor air quality, and semiconductor processing environments. However, environmental variations can interfere with detection data. To address this, the system is designed to accommodate the specific characteristics of different semiconductor thin-film materials, thereby improving the accuracy and stability of multi-gas detection. It also incorporates temperature and humidity compensation for precise adjustment and calibration of resistance values.