Research on Angle Calculation and Calibration of Inclination Sensor Based on Microelectromechanical System

MEMS is a technology that integrates micromechanical components and electronic circuits on the same chip, which fabricates micron-scale sensor structures on silicon-based materials through semiconductor processes, so that the traditional huge accelerometers can be miniaturized to form microelectromechanical system accelerometers. In order to meet the application requirements of inclination detection in infrastructure engineering, an inclination detection device based on microelectromechanical system three-axis accelerometer was designed. The scheme realizes the high-precision detection of the inclination angle and shows that it can be used to detect the inclination angle of the pole in the infrastructure group tower, which has the characteristics of high reliability and low power consumption and can be extended to various occasions that require accurate detection of the inclination angle.