A 512×256 TFT-Based Image Array Sensor with High Sensitivity, High Frame Rate and Wide Dynamic Range for Industrial Soft X-Ray Detection

This work presents a novel active pixel sensor (APS) design for soft X-ray flat panel detectors (FPDs) intended for non-destructive testing (NDT) applications that require high sensitivity, a wide dynamic range, and fast imaging capabilities. Unlike conventional passive pixel sensor (PPS), this design employs dual-gate thin film transistor (TFT) operating in the subthreshold region to compress and amplify optical signals, thereby expanding both detection limit and range. The array features randomly-accessible capabilities, achieving a frame rate of 88fps, making it as a promising candidate for real-time in-line inspection applications.