Enhancing Silicon-Based Accelerometer Performance Using the f-Squared Method

This paper presents a comprehensive evaluation of the critical parameters of silicon-based vibrating beam accelerometers (VBA) designed for aerospace applications. The study investigates the impact of applying the f-square method to optimize key performance parameters while ensuring that other critical characteristics remain unaffected. Building upon previous work that introduced the principal parameters of 25g and 100g accelerometers using the f-method [1], as well as prior discussions on the advantages of the f-square method in reducing vibration rectification error [2], this paper extends the analysis by presenting new experimental results on scale factor non-linearity (SFNL) across the full-scale range (FSR).