Advances in Infrasound Sensing Technology From Conventional Sensors to MEMS: A Review

This review highlights the progress of infrasound sensing technologies (ISTs), emphasizing the transition from traditional sensors to modern microelectromechanical system (MEMS) sensors. Advancements in sensitivity, dynamic range, and miniaturization are analyzed alongside their implications for geophysics, atmospheric science, and industrial safety applications. By comparing various sensing technologies, this work provides insights into their strengths and limitations, guiding the selection of optimal solutions for infrasonic monitoring applications. The analysis concludes that MEMS sensors offer an optimal balance of sensitivity, dynamic range, integration, miniaturization, and power efficiency. This review further explores the potential applications of MEMS infrasound sensors combined to the Internet of Things and artificial intelligence (AI), aiming to expand the applicability of ISTs across diverse fields.