Mathematical and Simulation-Based Analysis of Multiple-Load Mobile Transport Systems in Semiconductor Manufacturing

In the semiconductor manufacturing processes, single-load mobile transport systems, which can handle only one load at a time, have traditionally been employed. However, with the increasing demand for transport efficiency, the adoption of multiple-load mobile transport systems has been expanding. This study aims to systematically analyze the multiple-load mobile transport system by implementing an algorithm that determines optimal decisions dynamically at each job request, enabling the identification of policy-independent characteristics of the system. Through mathematical analysis in static problem instances, this study identifies key factors influencing the operational efficiency of multiple-load mobile transport systems. Furthermore, it evaluated whether these factors exhibit consistent tendencies in dynamic environments by utilizing the implemented algorithm and a simulation environment replicating semiconductor manufacturing processes.