Increasing the time-constant of a thin film multijunction thermal converter for low frequency application (AC/DC transfer)

A planar thin-film multijunction thermal converter (MJTC) developed for low-frequency application has been optimized by adding a thermal mass in the heater area to increase the time constant of the MJTC from 100 ms to 3 s and more. The thermal mass of silicon is left under the heater during the anisotropic etching process. This technique should substantially reduce the transfer difference at frequencies below 100 Hz.<>