The Angular Vibration Detection Based on Optomechanical Micro-Gyroscope

A gyroscope is an inertial microsensor based on the Coriolis principle or the Sagnac effect to measure the magnitude and frequency changes of angular velocity. Traditional MEMS gyroscopes are difficult to improve in performance due to susceptibility to electromagnetic interference and electronic noise. This paper introduces a framework resonant gyroscope based on the cavity optomechanical system detection structure, analyzes its basic working mechanism, and conducts angular vibration experimental tests on the gyroscope chip. Experimental results show that under atmospheric pressure, the gyroscope can repeatedly measure angular vibrations as low as 0.15°/s, the corresponding sensitivity is 40 mV/(o/s), and ARW is $6.6^{\mathrm{o}}/\sqrt{h}$. Under the same order of magnitude of inertial mass, the gyroscope introduced in this paper exhibits significantly better accuracy than traditional MEMS gyroscopes and is not affected by electromagnetic interference.