Highly Sensitive Cryogenic Temperature Sensors Utlizing Custom-Fabricated Ruthenium Oxide Slurry

This study reports the development of ruthenium oxide (RuO2) temperature sensor utilizing a custom-formulated RuO2 slurry, incorporating precisely engineered conductive phase and tailored glass frit matrix to optimize performance under cryogenic conditions. This designed RuO2 temperature sensor is engineered for high sensitivity, stability, and reduced resistance at cryogenic temperatures. Notably, the sensor containing 20% conductive paste demonstrated superior stability and sensitivity compared to the commercial RX-102B-RS RuO2 sensor across the 4.2 K to 46.8 K temperature range. The result shown that 20% conductive component is best the sensor achieved a stability of 19.8 mK and a sensitivity of 58.539 Ω/K at 4.2 K, with a relative sensitivity of 0.038/K, indicating excellent performance. This work advances cryogenic measurement of superconductivity research significantly.