Electrostatic Mems Switch with Isolated Switching Path and State-Holding Mechanical Latch Structures

We developed a 3.3×2.5 mm² tiny electrostatic MEMS switch with a physically isolated switching part and stateholdable lock structures. The proposed switch can hold the ON-state using the mechanical lock structures and reset the ON-state by driving resetting comb drive actuator. The proposed structure’s electrostatic actuator and switching parts are physically isolated and supported with a 75-μm backside Si substrate. Due to the isolated structure, the actuating signals do not electrically affect the switching paths. The proposed device’s turn-on voltage was 25 V, and the reset voltage was 12 V.