Integrated Preconcentrator-Enhanced Gas Sensor for Low Power Detection of Low Concentration Toluene

This paper presents a miniaturized semiconductor toluene gas sensor with an integrated diffusion-based preconcentrator. The proposed design, featuring a micro-scale integrated and suspended structure, enhances gas detection performance while maintaining low power consumption. Experimental results demonstrated improved sensitivity for toluene detection using pulse-actuation of a microheater. The device eliminates the need for a separate preconcentrator unit, along with any additional structures for pumping or gas flow restriction. The sensor achieves an average power consumption of only 3.26 mW for the microheater, making it suitable for distributed detection of volatile organic compounds (VOCs) at concentrations as low as 50 ppb.