Force-Sensor Integrated Touch-Feeling Sensor Capable of Acquiring Subtle Texture Changes Caused by Contact Force

In this study, we have realized the first MEMS tactile device that can simultaneously acquire both a fingertip-level acute force sensing function and a micro-scale tactile texture. By simultaneously acquiring the contact force to the object, we demonstrated that it is possible to acquire accurate and stereoscopic information of microshape, frictional force, temperature, and hardness textures that represent surface tactile texture on flexible materials with large contact force dependence.