Design of MEMS Thermocouple with Chromel and Alumel (Cr-Al)

The design, simulation, and analysis of a MEMS-based thermocouple sensor utilizing Chromel (Cr) and Alumel (AI) materials, forming a Type K thermocouple known for its accuracy and stability in extreme temperature environments. The MEMS approach offers advantages such as miniaturization, rapid thermal response, and enhanced sensitivity, making the device suitable for applications requiring precise temperature measurement in challenging conditions. The thermocouple generates a Seebeck voltage proportional to the temperature difference between its hot and cold junctions. Simulation results using Ansys demonstrate the sensor's effectiveness. The temperature distribution indicates a significant thermal gradient, ranging from -200°C at the cold junction to a maximum of 1372°C at the hot junction, suggesting strong thermoelectric voltage generation potential. The total electric field intensity reaches a maximum of 1492.1 V/m, reflecting efficient charge separation and movement in response to the thermal gradient. The X-axis directional electric field intensity peaks at 49.427 V/m, showing localized regions of charge carrier concentration that are crucial for the sensor's functionality. The MEMS-based thermocouple shows excellent thermal and electrical response characteristics, making it ideal for high-performance temperature sensing in industrial, biomedical, and environmental applications.