Development of a Large Aperture Fast Steering Mirror Based on Piezoelectric Differential Driving Mechanism

As optical technology advances rapidly, the application areas for fast steering mirror (FSM) are continually expanding, leading to a growing demand for large aperture FSM. In this paper, a large aperture FSM based on piezoelectric differential driving mechanism is proposed for the above demands. Through numerical simulation and optimization, prototype fabrication, and experimental testing, the results show that the proposed FSM has the function of multi-degree-of-freedom precision adjustment and can realize the function of rapid oscillation of the optical axis of the reflector to meet the requirement of precise pointing of a wide range of beams.