Quick update of Virtual Metrology using Weighted Transfer Lasso

This paper reports on a new update method for Virtual Metrology (VM). VM is a widely used technique in equipment quality control (QC) of semiconductor manufacturing. When using VMs in a semiconductor factory, VM models must be updated. The traditional approach is to collect a large amount of data over a long period to update the VM. We aim to update VM quickly, achieving high accuracy in a short period. To achieve this aim, we developed a new method called "Weighted Transfer Lasso". In this paper, we report that it achieves high accuracy with quick update VM using Weighted Transfer Lasso. Weighted Transfer Lasso showed a higher correlation coefficient and reasonable variable selection. Therefore, when we launch the new 300mm equipment, we can achieve quick update of VM using Weighted Transfer Lasso.