Emerging Applications Driving Future MEMS Product and Technology Development

This paper provides an overview of emerging applications which will drive innovation in the MEMS industry for many years to come. Examples range from highly accurate inertial MEMS for future car navigation tasks, over new sensing technologies for wearable “vital sign monitoring” solutions, to new MEMS based man-machine interfaces. The paper will analyze how these new MEMS products call for innovation in design and process technology and will require new approaches in “front-end/back-end” integration. It will show examples at STMicroelectronics (ST) of integrating “intelligence” into the MEMS device, enabling basic AI locally “in the edge”. Lastly, the paper will elaborate on the importance of “sustainability” at ST built into every single step of the MEMS value chain.