Bibliometric Study of Artificial Intelligence and Semiconductor Manufacturing Industry

Artificial Intelligence (AI) has already changed the industry and is expected to bring more changes. Furthermore, the semiconductor manufacturing area, one of the extremely high-tech industries, is attempting to increase the production efficiency of the manufacturing industry based on a huge amount of data generated from semiconductor production equipment and also attempting to design production equipment through AI. To understand the trend of these changes, we searched for various keywords including semiconductor manufacturing and AI, and constructed a dataset through Scopus and Web of Science, which are prominent databases, and limited the period to the period from 2020 to the present. We analyzed 1,498 publications from Scopus, 500 publications from Web of Science, and a total of 1,579 publications. The number of research publications increased every year, which shows that research on semiconductor manufacturing and AI is becoming more active with the increasing number of publications, and China and South Korea are the countries that produced the most publications. The main publication sources are the Proceedings of SPIE and IEEE Transactions on Semiconductor Manufacturing, and the keyword co-occurrence graph shows that there are attempts to apply AI in various fields of semiconductor manufacturing.