Capacitance Manometer Circuit for the Sapphire Capacitance Diaphragm Gauge Separated Model Model V8 Enabling Faster Response

Azbil Corporation (hereinafter referred to as Azbil) has developed and marketed the Model SPG sapphire capacitance diaphragm gauge equipped with a micro electromechanical systems (MEMS) sensor chip that uses single-crystal sapphire as the base material for the diaphragm, ensuring exceptional corrosion and heat resistance. Recently, Azbil developed the new Model V8 sapphire capacitance diaphragm gauge, which offers additional features and enhanced performance. For the Model V8, the circuitry has been thoroughly re-engineered to create a separated model in which the gauge head and control unit are separated, achieving a faster response speed. This paper focuses primarily on the development items related to its circuitry.