Basic Concept of the Modern Microsystem

The article examines various concepts of microsystem construction, analyzes the terminology used, and compares various concepts of microsystem construction, including standard and alternative ones. Based on this comparison, the basic model of the modern micro-system is developed and presented, as well as one of its possible variants. The proposed model has extensive modification capabilities and can be easily modified and supplemented in accordance with the requirements. Within the framework of the developed basic model, the terminology of microsystems is ordered, its general terms are defined, their functional relationship is shown, as well as their role and place in microsystem engineering. In addition, the approach proposed in this article to the construction of the model allowed us to establish the similarity of the terms transducer and executive microsystem, to establish the difference between the terms sensor and sensitive element, to highlight such terms as sensors and actuators, smart sensors and smart actuators, elements and components of a microsystem, etc. The proposed concept makes it possible to systematize ideas about microsystems, to highlight the ways of their research and design. The terminology proposed in the article is universal and can be extended to the field of nanosystem engineering.