Temperature Compensation of MEMS Resonant Accelerometer Based on Multiple Parameter Decoupling From Single Resonator

This article proposes a temperature compensation scheme for MEMS resonant accelerometer (MRA) based on multimode decoupling. The frequency changes of the first-order and second-order modes caused by temperature and acceleration are inconsistent. Therefore, temperature and acceleration can be solved by simultaneously measuring the first-order and second-order mode frequencies for temperature compensation. We designed a dual-mode closed-loop measurement system (DCMS) that simultaneously tracks the resonant frequency changes of the first-order and second-order modes, and designed a multiple-parameter decoupling algorithm to solve for temperature and acceleration. An experiment of the system is conducted using MRA based on a C-C beam. In a 24-h variable temperature measurement experiment (85 °C–10 °C), the acceleration drift is 46 mg, which is 13 times less than the output drift of the first-order mode (615 mg) and 15 times less than the output drift of the second-order mode (731 mg) without temperature compensation.