Pheromone Receptor-Based Olfactory Sensors Using Resonant Diamond Membranes

In this work, we present a fabrication technology and characterization of a diamond membrane-based sensor targeted for pheromone detection. Circular membrane with diameter of 850 μm and thickness of diamond in the range of 3566 nm to 4964 nm were successfully fabricated with integrated piezoresistive gauges for embedded electrical measurement. Calculation and simulation results aligned closely with experimental results of membrane resonance frequency. Values of resonance frequency in the air and in DI were measured to be 153.5 kHz - 254.0 kHz and 34.4 kHz - 65.3 kHz, respectively. Our ultimate goal is to functionalize this mechanical transducer with pheromone receptors in order to detect traces of pheromones and thus specific pest insects in the field through resonance frequency readout.