Design and Analysis of a Monolithic Tilt/Tip Platform Based on Anti-Symmetric Flexible Structure

With the development of precision machinery, there is a growing demand for space-based mechanical mechanisms with micro/nano precision such as tilt/tip stages. Here, we propose a design of a tilt/tip stage capable of biaxial deflection based on additive manufacturing, offering the high spatial compactness of the overall structure. The two axial offsets are driven by two piezoelectric ceramics (PZT), which are fixed on a set of orthogonally biased bridge amplifiers with dual symmetry in structure and drive. The horizontal displacement of the sideboard drives the two connected elliptical beams with different stiffnesses to deform in opposite directions, resulting in a biased pendulum motion of the actuating plane. This design features a compact overall size, high first-order module and stable operation. Individual deflection of x-axis and y-axis, as well as multi-angle deflection between them, can be achieved with minimal parasitic displacement. Results shows that the tilt/tip stage has a first order mode state of 968.17 Hz. The maximum biaxial deflection angle is 6.73 mrad when inputting 20 μm displacement. This work offers a novel concept for the future biaxial tilt/tip stage designs.