Positive Motion Control of a Piezo-Driven Flexure Micro-Positioning Stage for Chip Peeling

The process of ejecting and peeling the chip from the blue tape can easily lead to chip damage. It is of great importance to realize positively synchronous control of motion and force exerted on the chip during the ejection process. This paper developed a piezo-driven flexure micro-positioning stage for chip ejection which can realize positively synchronous control of motion and force. A bridge-type flexure mechanism is designed and a PID closed-loop control is developed. Based on this system, the difference in the required driving voltage for the piezoelectric actuator with and without a load is analyzed and a force prediction model is developed. The system achieves self-prediction of the force reacted from the chip during the ejection process. Finally, positive control of the motion and force synchronously during the chip ejecting process is realized.