Application of GaN-Based Optochips in Optical Gyroscope

In this work, a novel GaN-based optical chip for gyroscopes is demonstrated. The device comprises a square optical chip, a cantilever beam structure, and a soft plastic semi-sphere. Light-emitting diodes and photodetectors are integrated into the sapphire substrate. The integrated sensor with a size of $20 \mathrm{~mm} \times$ $10 \mathrm{~mm} \times 6.5 \mathrm{~mm}$ shows high linearity on angular velocity sensing with an R square of more than 0.998 and the angular velocity sensitivity is $6.15 \mu \mathrm{~A} /\left(100^{\circ} / \mathrm{s}\right)$ in the range from $1700^{\circ} / \mathrm{s}$ to 500° /s.